Determination of line edge roughness in low-dose top-down scanning electron microscopy images

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	English
Pages (from-to)	1-10
Number of pages	10
Journal	Journal of Micro/Nanolithography, MEMS, and MOEMS
Volume	13
Issue number	3
Publication status	Published - 2014

doi:10.1117/1.JMM.13.3.033009

Cite this

@article{0372a412b4444e29b2918b2a50effa3d,

title = "Determination of line edge roughness in low-dose top-down scanning electron microscopy images",

author = "T Verduin and P Kruit and CW Hagen",

note = "doi:10.1117/1.JMM.13.3.033009",

year = "2014",

language = "English",

volume = "13",

pages = "1--10",

journal = "Journal of Micro/Nanolithography, MEMS, and MOEMS",

issn = "1932-5150",

publisher = "SPIE",

number = "3",

}

TY - JOUR

T1 - Determination of line edge roughness in low-dose top-down scanning electron microscopy images

AU - Verduin, T

AU - Kruit, P

AU - Hagen, CW

N1 - doi:10.1117/1.JMM.13.3.033009

PY - 2014

Y1 - 2014

UR - http://spie.org/advanced-lithography.xml

M3 - Article

SN - 1932-5150

VL - 13

SP - 1

EP - 10

JO - Journal of Micro/Nanolithography, MEMS, and MOEMS

JF - Journal of Micro/Nanolithography, MEMS, and MOEMS

IS - 3

ER -