Determination of resist parameters using the extended Nijboer-Zernike theory.

P. Dirksen, JJM Braat, AJEM Janssen, A Leeuwestein, H Kwinten, D van Steenwinckel

Research output: Contribution to journalConference articleScientificpeer-review

21 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)150-159
Number of pages10
JournalProceedings of SPIE- International Society for Optical Engineering
Volume5377
Publication statusPublished - 2004

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