Determination of steep sidewall angle using polarization-sensitive asymmetric scattering

Xiujie Dou, Silvania F. Pereira*, Changjun Min, Yuquan Zhang, Peiwen Meng, H. Paul Urbach, Xiaocong Yuan

*Corresponding author for this work

Research output: Contribution to journalArticleScientificpeer-review

1 Citation (Scopus)
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