Determination of the full scattering matrix using coherent Fourier scatterometry

Nitish Kumar, Luca Cisotto, Sarathi Roy, GKP Ramanandan, Silvania F. Pereira, H. Paul Urbach

Research output: Contribution to journalArticleScientificpeer-review

5 Citations (Scopus)

Abstract

We demonstrate a method to obtain within an arbitrary numerical aperture (NA) the entire scattering matrix of a scatterer by using focused beam coherent Fourier scatterometry. The far-field intensities of all scattered angles within the NA of the optical system are obtained in one shot. The corresponding phases of the field are obtained by an interferometric configuration. This method enables the retrieval of the maximum available information about the scatterer from scattered far-field data contained in the given NA of the system.

Original languageEnglish
Pages (from-to)4408-4413
Number of pages6
JournalApplied Optics
Volume55
Issue number16
DOIs
Publication statusPublished - 1 Jun 2016

Keywords

  • Diffraction theory
  • Phase measurement
  • Interferometry
  • Scattering measurements

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