Determination of the thickness of Cu/Fe layers on silicon using Electron Probe X-ray Micro-Analysis (EPMA)

Research output: Book/Report › Report › Professional

Original language	Undefined/Unknown
Place of Publication	onbekend
Publisher	sect Physical & Chemical Materials Science TM/FCM
Number of pages	3
Publication status	Published - 2002

Name
Publisher	sect Physical & Chemical Materials Science TM/FCM

Keywords

TY - BOOK

T1 - Determination of the thickness of Cu/Fe layers on silicon using Electron Probe X-ray Micro-Analysis (EPMA)

AU - Kwakernaak, C

AU - Sloof, WG

PY - 2002

Y1 - 2002

KW - Geen BTA classificatie

M3 - Report

BT - Determination of the thickness of Cu/Fe layers on silicon using Electron Probe X-ray Micro-Analysis (EPMA)

PB - sect Physical & Chemical Materials Science TM/FCM

CY - onbekend

ER -