Development and applications of novel optoelectromechanical system micro-machined in silicon

G Vdovin, PJ French, JH Huijsing, M Loktev

Research output: Book/ReportReportProfessional

Original languageUndefined/Unknown
Place of PublicationS.l.
Publishers.n.
Number of pages31
Publication statusPublished - 2000

Publication series

Name
PublisherS.n.

Keywords

  • ZX Int.klas.verslagjaar < 2002

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