Development and applications of novel optoelectromechanical systems micro-machined in silicon. Part 1. Project overview: 2nd annual report

G Vdovin

Research output: Book/Report › Report › Professional

Original languageUndefined/Unknown
Place of PublicationS.l.
Publishers.n.
Number of pages21
Publication statusPublished - 2000

Publication series

Name
PublisherS.n.

Bibliographical note

LTR 31063

Keywords

  • ZX Int.klas.verslagjaar < 2002

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