Development and optical performance tests of the Si immersed grating demonstrator for E-ELT METIS

R. Navarro, Tibor Agócs, L Venema, A.H. van Amerongen, M. Rodenhuis, Ruud W. M. Hoogeveen, T Coppens, Bernhard Brandl, R. Vink

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

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Immersed gratings offer several advantages over conventional gratings: more compact spectrograph designs, and by using standard semiconductor industry techniques, higher diffraction-efficiency and lower stray-light can be achieved. We present the optical tests of the silicon immersed grating demonstrator for the Mid-infrared E-ELT Imager and Spectrograph, METIS. We detail the interferometric tests that were done to measure the wavefront-error and present the results of the throughput and stray-light measurements. We also elaborate on the challenges encountered and lessons learned during the immersed grating demonstrator test campaign that helped us to improve the fabrication processes of the grating patterning on the wafer.

Original languageEnglish
Title of host publicationICSO 2016, International Conference on Space Optics
Subtitle of host publicationBiarritz, France, 18–21 October 2016
EditorsB. Cugny, N. Karafolas, Z. Sodnik
Number of pages8
Publication statusPublished - 2017
EventInternational Conference on Space Optics - Biarritz, France
Duration: 18 Oct 201621 Oct 2016

Publication series

NameProceedings of SPIE


ConferenceInternational Conference on Space Optics
Abbreviated titleICSO 2016
Internet address

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