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Development of a detachable high speed miniature scanning probe microscope for large area substrates inspection
Hamed Sadeghian Marnani, R. Herfst, J. Winters, W.E. Crowcombe, G. Kramer, Teun Van Den Dool, Maarten van Es
Research output: Contribution to journal › Article › Scientific › peer-review
13
Citations
(Scopus)