Development of a multi electron beam source for sub-10 nm electron beam induced deposition

MJ van Bruggen, B van Someren, P Kruit

    Research output: Contribution to journalArticleScientificpeer-review

    22 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)2833-2839
    Number of pages7
    JournalJournal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
    Volume23
    Issue number6
    Publication statusPublished - 2005

    Keywords

    • ZX CWTS 1.00 <= JFIS < 3.00

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