@article{3e913063d2b5420f9dac4d83ef46082d,
title = "Development of a multi electron beam source for sub-10 nm electron beam induced deposition",
keywords = "ZX CWTS 1.00 <= JFIS < 3.00",
author = "{van Bruggen}, MJ and {van Someren}, B and P Kruit",
year = "2005",
language = "Undefined/Unknown",
volume = "23",
pages = "2833--2839",
journal = "Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures",
issn = "1071-1023",
publisher = "AVS Science and Technology Society",
number = "6",
}