Development of a nanometer resolution constant velocity piezoelectric actuator (niet eerder opgenomen)

JC Fasick, PFAM Putten, AD Ruxton

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Original languageUndefined/Unknown
Title of host publicationOctober 25-30
Place of PublicationSt. Louis, Missouri, USA
PublisherASPE
Pages329-333
Number of pages5
ISBN (Print)1-887706-20-8
Publication statusPublished - 1998

Publication series

Name
PublisherASPE

Keywords

  • ZX Int.klas.verslagjaar < 2002

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