Development of a new micro-machining center concept with integrated metrology modules.

This paper presents the development of a micro-machining center to manufacture micro-scaled parts utilizing micro-milling, micro-EDM and micro-ECM. In addition to manufacturing versatility, it is envisaged to integrate metrology tools for on the machine part verifiction. The system specifications are a working volume of 50 mm c 50 mm x 20 mm at a maximum acceleration of 30 m.s-2, a maximum velocity of 200 mm.s-1, and an active magnetic bearing spindle capable of rotational speeds greater than 300 kRPM. The achievable three-dimensional part uncertainty is subdivided into two different methods; high metal removal rae and low metal removal rate. The high metal removal rage method uses mu-milling with a targeted 3-D part uncertainty of better than 2 mu (1 sigma), while the low metal removal rate is achieved by muEDM and muECM with a target uncertainty of 0.1 mum (1 sigma)