Development of deep dry etching for intelligent mocromachine devices.

Research output: Book/Report › Report › Professional

Original language	Undefined/Unknown
Place of Publication	Delft
Publisher	Delft University of Technology
Number of pages	12
Publication status	Published - 2001

Name
Publisher	TU Delft

Confidenial

Keywords

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title = "Development of deep dry etching for intelligent mocromachine devices.",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "MA Blauw and MF Craciun and {van der Drift}, EWJM and PJ French",

note = "Confidenial",

year = "2001",

language = "Undefined/Unknown",

publisher = "Delft University of Technology",

address = "Netherlands",

}

TY - BOOK

T1 - Development of deep dry etching for intelligent mocromachine devices.

AU - Blauw, MA

AU - Craciun, MF

AU - van der Drift, EWJM

AU - French, PJ

N1 - Confidenial

PY - 2001

Y1 - 2001

KW - ZX Int.klas.verslagjaar < 2002

M3 - Report

BT - Development of deep dry etching for intelligent mocromachine devices.

PB - Delft University of Technology

CY - Delft

ER -