Development of post processing micromachining modules for integrated sensors and actuators applications

HMT Pham, L Pakula, G Pandraud, PJ French, PM Sarro

Research output: Book/Report › Report › Professional

Name
Publisher	s.n.

Keywords

@book{9f42fead31594aff83d870d869fbe878,

title = "Development of post processing micromachining modules for integrated sensors and actuators applications",

keywords = "Elektrotechniek, Techniek, Geen BTA classificatie",

author = "HMT Pham and L Pakula and G Pandraud and PJ French and PM Sarro",

year = "2003",

language = "Undefined/Unknown",

volume = "DMF 5103",

publisher = "s.n.",

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TY - BOOK

T1 - Development of post processing micromachining modules for integrated sensors and actuators applications

AU - Pham, HMT

AU - Pakula, L

AU - Pandraud, G

AU - French, PJ

AU - Sarro, PM

PY - 2003

Y1 - 2003

KW - Elektrotechniek

KW - Techniek

KW - Geen BTA classificatie

M3 - Report

VL - DMF 5103

BT - Development of post processing micromachining modules for integrated sensors and actuators applications

PB - s.n.

CY - s.l.

ER -