Development of post processing micromachining modules for integrated sensors and actuators applications

TMH Pham, L Pakula, G Pandraud, PJ French, PM Sarro

Research output: Book/Report › Report › Professional

Original language	Undefined/Unknown
Place of Publication	Delft
Publisher	Delft University of Technology - EI/ECTM-DIMES
Number of pages	14
Volume	STW - DMF.5103
Publication status	Published - 2004

Name
Publisher	Delft University of Technology - EI/ECTM-DIMES

Keywords

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title = "Development of post processing micromachining modules for integrated sensors and actuators applications",

keywords = "Geen BTA classificatie",

author = "TMH Pham and L Pakula and G Pandraud and PJ French and PM Sarro",

year = "2004",

language = "Undefined/Unknown",

volume = "STW - DMF.5103",

publisher = "Delft University of Technology - EI/ECTM-DIMES",

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TY - BOOK

T1 - Development of post processing micromachining modules for integrated sensors and actuators applications

AU - Pham, TMH

AU - Pakula, L

AU - Pandraud, G

AU - French, PJ

AU - Sarro, PM

PY - 2004

Y1 - 2004

KW - Geen BTA classificatie

M3 - Report

VL - STW - DMF.5103

BT - Development of post processing micromachining modules for integrated sensors and actuators applications

PB - Delft University of Technology - EI/ECTM-DIMES

CY - Delft

ER -