Development of post processing micromachining modules for integrated sensors and actuators applications

TMH Pham, L Pakula, G Pandraud, PJ French, PM Sarro

Research output: Book/Report › Report › Professional

Name
Publisher	STW

Keywords

@book{42f1d0b0bfb645da9aa590901568b4e4,

title = "Development of post processing micromachining modules for integrated sensors and actuators applications",

keywords = "Elektrotechniek, Techniek, Geen BTA classificatie",

author = "TMH Pham and L Pakula and G Pandraud and PJ French and PM Sarro",

year = "2005",

language = "Undefined/Unknown",

volume = "STW meeting",

publisher = "STW",

}

TY - BOOK

T1 - Development of post processing micromachining modules for integrated sensors and actuators applications

AU - Pham, TMH

AU - Pakula, L

AU - Pandraud, G

AU - French, PJ

AU - Sarro, PM

PY - 2005

Y1 - 2005

KW - Elektrotechniek

KW - Techniek

KW - Geen BTA classificatie

M3 - Report

VL - STW meeting

BT - Development of post processing micromachining modules for integrated sensors and actuators applications

PB - STW

CY - Utrecht

ER -