Development of silicon accelerometers using epi-micromachining

PTJ Gennissen, PJ French

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

2 Citations (Scopus)

Original language	Undefined/Unknown
Title of host publication	Micromachined devices and components V (Proceedings of SPIE 3876)
Editors	PJ French, E Peeters
Place of Publication	Bellingham
Publisher	International Society for Optical Engineering
Pages	84-92
Number of pages	9
ISBN (Print)	0-8194-3473-6
Publication status	Published - 1999
Event	SPIE Conference on Micromachined Devices and Components V, Santa Clara - Bellingham Duration: 20 Sept 1999 → 21 Sept 1999

Name
Publisher	International Society for Optical Engineering

Conference	SPIE Conference on Micromachined Devices and Components V, Santa Clara
Period	20/09/99 → 21/09/99

Keywords

@inproceedings{2216212c36954d3386f3a7c73f0f1e39,

title = "Development of silicon accelerometers using epi-micromachining",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "PTJ Gennissen and PJ French",

year = "1999",

language = "Undefined/Unknown",

isbn = "0-8194-3473-6",

publisher = "International Society for Optical Engineering",

pages = "84--92",

editor = "{PJ French} and {E Peeters}",

booktitle = "Micromachined devices and components V (Proceedings of SPIE 3876)",

note = "SPIE Conference on Micromachined Devices and Components V, Santa Clara ; Conference date: 20-09-1999 Through 21-09-1999",

}

Development of silicon accelerometers using epi-micromachining. / Gennissen, PTJ; French, PJ.
Micromachined devices and components V (Proceedings of SPIE 3876). ed. / PJ French; E Peeters. Bellingham: International Society for Optical Engineering, 1999. p. 84-92.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Development of silicon accelerometers using epi-micromachining

AU - Gennissen, PTJ

AU - French, PJ

PY - 1999

Y1 - 1999

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 0-8194-3473-6

SP - 84

EP - 92

BT - Micromachined devices and components V (Proceedings of SPIE 3876)

A2 - PJ French, null

A2 - E Peeters, null

PB - International Society for Optical Engineering

CY - Bellingham

T2 - SPIE Conference on Micromachined Devices and Components V, Santa Clara

Y2 - 20 September 1999 through 21 September 1999

ER -