Development of silicon accelerometers using epi-micromachining

PTJ Gennissen, PJ French

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

2 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationMicromachined devices and components V (Proceedings of SPIE 3876)
Editors PJ French, E Peeters
Place of PublicationBellingham
PublisherInternational Society for Optical Engineering
Pages84-92
Number of pages9
ISBN (Print)0-8194-3473-6
Publication statusPublished - 1999
EventSPIE Conference on Micromachined Devices and Components V, Santa Clara - Bellingham
Duration: 20 Sep 199921 Sep 1999

Publication series

Name
PublisherInternational Society for Optical Engineering

Conference

ConferenceSPIE Conference on Micromachined Devices and Components V, Santa Clara
Period20/09/9921/09/99

Keywords

  • ZX Int.klas.verslagjaar < 2002

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