Development of Silicon Micromachined Microlens Antennas at 1.9 THz

Maria Alonso-Delpino, Theodore Reck, Cecile Jung-Kubiak, Choonsup Lee, Goutam Chattopadhyay

Research output: Contribution to journalArticleScientificpeer-review

25 Citations (Scopus)


The development at 1.9 THz of a microlens antenna consisting of a leaky-wave waveguide feeding and a silicon microlens is presented in this paper. The antenna has excellent performances compared to horn antennas and can be fabricated entirely using silicon micromachining. Two antenna prototypes were developed: one with a 2.6-mm-diameter microlens and a directivity of 33.2 dB and the other with a 6.35-mm-diameter microlens and a directivity of 41.2 dB. Both prototypes were fabricated and measured, obtaining good agreements with simulations. The fabrication, assembly, and measurement process are explained and detailed in this paper.

Original languageEnglish
Article number7843602
Pages (from-to)191-198
Number of pages8
JournalIEEE Transactions on Terahertz Science and Technology
Issue number2
Publication statusPublished - Mar 2017
Externally publishedYes


  • Antenna
  • leaky-wave terahertz (THz)
  • lens
  • microlens
  • shallow lens
  • submillimeter wave


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