Development of Ultra-Low-Noise TES Bolometer Arrays

T. Suzuki*, P. Khosropanah, M. L. Ridder, R. A. Hijmering, J. R. Gao, H. Akamatsu, L. Gottardi, J. van der Kuur, B. D. Jackson

*Corresponding author for this work

    Research output: Contribution to journalArticleScientificpeer-review

    22 Citations (Scopus)


    SRON is developing ultra-low-noise transition edge sensors (TESs) based on a superconducting Ti/Au bilayer on a suspended SiN island with SiN legs for SAFARI aboard SPICA. We have two major concerns about realizing TESs with an ultra-low NEP of 2×10-19W/Hz: achieving lower thermal conductance and no excess noise with respect to the phonon noise. To realize TESs with phonon-noise-limited NEPs, we need to make thinner (c of ∼93mK and Rn of ∼158mΩ. These TESs were characterized under AC bias using our frequency-division multiplexing readout (1–3 MHz) system. TESs without the absorber show NEPs as low as 1.1×10-19W/Hz with a reasonable response speed (

    Original languageEnglish
    Pages (from-to)52-59
    Number of pages8
    JournalJournal of Low Temperature Physics
    Issue number1
    Publication statusPublished - 1 Jul 2016


    • Cryogenic detectors
    • Deep reactive-ion etching
    • DRIE
    • Far-infrared spectrometer
    • SiN membrane
    • TES
    • THz detectors
    • Transition edge sensor


    Dive into the research topics of 'Development of Ultra-Low-Noise TES Bolometer Arrays'. Together they form a unique fingerprint.

    Cite this