Development of Ultra-Low-Noise TES Bolometer Arrays

T. Suzuki; P. Khosropanah; M. L. Ridder; R. A. Hijmering; J. R. Gao; H. Akamatsu; L. Gottardi; J. van der Kuur; B. D. Jackson

doi:10.1007/s10909-015-1401-z

Development of Ultra-Low-Noise TES Bolometer Arrays

T. Suzuki^*, P. Khosropanah, M. L. Ridder, R. A. Hijmering, J. R. Gao, H. Akamatsu, L. Gottardi, J. van der Kuur, B. D. Jackson

^*Corresponding author for this work

Research output: Contribution to journal › Article › Scientific › peer-review

27 Citations (Scopus)

Abstract

SRON is developing ultra-low-noise transition edge sensors (TESs) based on a superconducting Ti/Au bilayer on a suspended SiN island with SiN legs for SAFARI aboard SPICA. We have two major concerns about realizing TESs with an ultra-low NEP of 2×10-19W/Hz: achieving lower thermal conductance and no excess noise with respect to the phonon noise. To realize TESs with phonon-noise-limited NEPs, we need to make thinner (c of ∼93mK and R_n of ∼158mΩ. These TESs were characterized under AC bias using our frequency-division multiplexing readout (1–3 MHz) system. TESs without the absorber show NEPs as low as 1.1×10-19W/Hz with a reasonable response speed (

Original language	English
Pages (from-to)	52-59
Number of pages	8
Journal	Journal of Low Temperature Physics
Volume	184
Issue number	1
DOIs	https://doi.org/10.1007/s10909-015-1401-z
Publication status	Published - 1 Jul 2016

Keywords

Cryogenic detectors
Deep reactive-ion etching
DRIE
Far-infrared spectrometer
SiN membrane
TES
THz detectors
Transition edge sensor

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10.1007/s10909-015-1401-z

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title = "Development of Ultra-Low-Noise TES Bolometer Arrays",

abstract = "SRON is developing ultra-low-noise transition edge sensors (TESs) based on a superconducting Ti/Au bilayer on a suspended SiN island with SiN legs for SAFARI aboard SPICA. We have two major concerns about realizing TESs with an ultra-low NEP of 2×10-19W/Hz: achieving lower thermal conductance and no excess noise with respect to the phonon noise. To realize TESs with phonon-noise-limited NEPs, we need to make thinner (c of ∼93mK and Rn of ∼158mΩ. These TESs were characterized under AC bias using our frequency-division multiplexing readout (1–3 MHz) system. TESs without the absorber show NEPs as low as 1.1×10-19W/Hz with a reasonable response speed (",

keywords = "Cryogenic detectors, Deep reactive-ion etching, DRIE, Far-infrared spectrometer, SiN membrane, TES, THz detectors, Transition edge sensor",

author = "T. Suzuki and P. Khosropanah and Ridder, {M. L.} and Hijmering, {R. A.} and Gao, {J. R.} and H. Akamatsu and L. Gottardi and {van der Kuur}, J. and Jackson, {B. D.}",

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doi = "10.1007/s10909-015-1401-z",

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AU - Suzuki, T.

AU - Khosropanah, P.

AU - Ridder, M. L.

AU - Hijmering, R. A.

AU - Gao, J. R.

AU - Akamatsu, H.

AU - Gottardi, L.

AU - van der Kuur, J.

AU - Jackson, B. D.

PY - 2016/7/1

Y1 - 2016/7/1

N2 - SRON is developing ultra-low-noise transition edge sensors (TESs) based on a superconducting Ti/Au bilayer on a suspended SiN island with SiN legs for SAFARI aboard SPICA. We have two major concerns about realizing TESs with an ultra-low NEP of 2×10-19W/Hz: achieving lower thermal conductance and no excess noise with respect to the phonon noise. To realize TESs with phonon-noise-limited NEPs, we need to make thinner (c of ∼93mK and Rn of ∼158mΩ. These TESs were characterized under AC bias using our frequency-division multiplexing readout (1–3 MHz) system. TESs without the absorber show NEPs as low as 1.1×10-19W/Hz with a reasonable response speed (

AB - SRON is developing ultra-low-noise transition edge sensors (TESs) based on a superconducting Ti/Au bilayer on a suspended SiN island with SiN legs for SAFARI aboard SPICA. We have two major concerns about realizing TESs with an ultra-low NEP of 2×10-19W/Hz: achieving lower thermal conductance and no excess noise with respect to the phonon noise. To realize TESs with phonon-noise-limited NEPs, we need to make thinner (c of ∼93mK and Rn of ∼158mΩ. These TESs were characterized under AC bias using our frequency-division multiplexing readout (1–3 MHz) system. TESs without the absorber show NEPs as low as 1.1×10-19W/Hz with a reasonable response speed (

KW - Cryogenic detectors

KW - Deep reactive-ion etching

KW - DRIE

KW - Far-infrared spectrometer

KW - SiN membrane

KW - TES

KW - THz detectors

KW - Transition edge sensor

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DO - 10.1007/s10909-015-1401-z

M3 - Article

AN - SCOPUS:84951970091

SN - 0022-2291

VL - 184

SP - 52

EP - 59

JO - Journal of Low Temperature Physics

JF - Journal of Low Temperature Physics

IS - 1

ER -

Development of Ultra-Low-Noise TES Bolometer Arrays

Abstract

Keywords

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