Development of Ultra-Low-Noise TES Bolometer Arrays

T. Suzuki, P. Khosropanah, M. L. Ridder, R. A. Hijmering, J. R. Gao, H. Akamatsu, L. Gottardi, J. van der Kuur, B. D. Jackson

Research output: Contribution to journalArticleScientificpeer-review

18 Citations (Scopus)


SRON is developing ultra-low-noise transition edge sensors (TESs) based on a superconducting Ti/Au bilayer on a suspended SiN island with SiN legs for SAFARI aboard SPICA. We have two major concerns about realizing TESs with an ultra-low NEP of 2×10-19W/Hz: achieving lower thermal conductance and no excess noise with respect to the phonon noise. To realize TESs with phonon-noise-limited NEPs, we need to make thinner (c of ∼93mK and Rn of ∼158mΩ. These TESs were characterized under AC bias using our frequency-division multiplexing readout (1–3 MHz) system. TESs without the absorber show NEPs as low as 1.1×10-19W/Hz with a reasonable response speed (

Original languageEnglish
Pages (from-to)52-59
Number of pages8
JournalJournal of Low Temperature Physics
Issue number1
Publication statusPublished - 1 Jul 2016


  • Cryogenic detectors
  • Deep reactive-ion etching
  • DRIE
  • Far-infrared spectrometer
  • SiN membrane
  • TES
  • THz detectors
  • Transition edge sensor

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