Diffusion-Mediated Growth and Size-Dependent Nanoparticle Reactivity during Ruthenium Atomic Layer Deposition on Dielectric Substrates

Job Soethoudt*, Fabio Grillo, Esteban A. Marques, J. Ruud van Ommen, Yoann Tomczak, Laura Nyns, Sven Van Elshocht, Annelies Delabie

*Corresponding author for this work

Research output: Contribution to journal › Article › Scientific › peer-review

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Material Science

Chemical Engineering

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