Direct bonding of processed LPCVD silicon nitride films (U-SP-2-I-ICT)

G Pandraud, PJ French, CL Hsu, JF Creemer, JC Wolff, BJ Thijsse, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Original languageUndefined/Unknown
Title of host publicationProceedings of the The 17th Micromechanics Europe Workshop, MME'06
EditorsRF Wolffenbuttel
Place of PublicationSouthampton, U.K
PublisherMME
Pages1-4
Number of pages4
ISBN (Print)9780854328482
Publication statusPublished - 2006
EventThe 17th Micromechanics Europe Workshop, MME'06, Southampton, UK - Southampton U.K
Duration: 3 Sep 20065 Sep 2006

Publication series

Name
PublisherMME

Conference

ConferenceThe 17th Micromechanics Europe Workshop, MME'06, Southampton, UK
Period3/09/065/09/06

Keywords

  • professional journal papers
  • Conf.proc. > 3 pag

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