Direct spray coating of photoresist - a new method for patterning 3-D structures

PN Pham, TLM Scholtes, R Klerks, E Boellaard, PM Sarro, JN Burghartz

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationProceedings Eurosensors XVI
EditorsJ Saneistr, P Ripka
Place of PublicationPrague
PublisherCzech Technical University
Pages182-185
Number of pages4
Publication statusPublished - 2002
EventEurosensors XVI, Prague, Czech Republic - Prague
Duration: 15 Sep 200218 Sep 2002

Publication series

Name
PublisherCzech Technical University

Conference

ConferenceEurosensors XVI, Prague, Czech Republic
Period15/09/0218/09/02

Bibliographical note

CD-rom

Keywords

  • Elektrotechniek
  • Techniek
  • Conf.proc. > 3 pag

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