@inproceedings{dd45307260d549e9b8fd1adc28efd8d7,
title = "Direct spray coating of photoresist - a new method for patterning 3-D structures",
keywords = "Elektrotechniek, Techniek, Conf.proc. > 3 pag",
author = "PN Pham and TLM Scholtes and R Klerks and E Boellaard and PM Sarro and JN Burghartz",
note = "CD-rom; Eurosensors XVI, Prague, Czech Republic ; Conference date: 15-09-2002 Through 18-09-2002",
year = "2002",
language = "Undefined/Unknown",
publisher = "Czech Technical University",
pages = "182--185",
editor = "J Saneistr and P Ripka",
booktitle = "Proceedings Eurosensors XVI",
}