Direct wafer bonding of processed LPCVD silicon nitride films

CL Hsu, JF Creemer, G Pandraud, JC Wolff, BJ Thijsse, PM Sarro, PJ French

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationProceedings of the 17th MME MicroMechanics Europe Workshop
Editors s.n.
Place of PublicationSouthampton
PublisherH.Morgan Ed.
Pages89-92
Number of pages4
ISBN (Print)085432-648-3
Publication statusPublished - 2006
Eventthe 17th MME MicroMechanics Europe Workshop - Southampton
Duration: 3 Sep 20065 Sep 2006

Publication series

Name
PublisherH. Morgan Ed.

Conference

Conferencethe 17th MME MicroMechanics Europe Workshop
Period3/09/065/09/06

Keywords

  • Elektrotechniek
  • Techniek
  • conference contrib. refereed
  • Conf.proc. > 3 pag

Cite this