@inproceedings{8f27a84677b0424ca8996e5a30db6ee9,
title = "Direct wafer bonding of processed LPCVD silicon nitride films",
keywords = "Elektrotechniek, Techniek, conference contrib. refereed, Conf.proc. > 3 pag",
author = "CL Hsu and JF Creemer and G Pandraud and JC Wolff and BJ Thijsse and PM Sarro and PJ French",
year = "2006",
language = "Undefined/Unknown",
isbn = "085432-648-3",
publisher = "H.Morgan Ed.",
pages = "89--92",
editor = "s.n.",
booktitle = "Proceedings of the 17th MME MicroMechanics Europe Workshop",
note = "the 17th MME MicroMechanics Europe Workshop ; Conference date: 03-09-2006 Through 05-09-2006",
}