Double laser annealing of implanted silicon by using laser pulse offsets

V Gonda, J Slabbekoorn, LK Nanver

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationSAFE 2007 Semiconductor advances for future electornics
Editors s.n.
Place of Publications.l.
PublisherSTW
Pages1-4
Number of pages4
Publication statusPublished - 2007

Publication series

Name
PublisherSTW

Keywords

  • conference contrib. refereed
  • Vakpubl., Overig wet. > 3 pag

Cite this