@inproceedings{59b200df66c24943a18df422a5175075,
title = "DRIE and bonding assisted low cost MEMS processing of inplane HAR inertial sensors",
keywords = "Elektrotechniek, Techniek, conference contrib. non-refer., Conf.proc. > 3 pag",
author = "V Rajaraman and KAA Makinwa and PJ French",
year = "2008",
language = "Undefined/Unknown",
isbn = "978-1-4244-2325-5",
publisher = "ASDAM",
pages = "327--330",
editor = "s.n.",
booktitle = "Proceedings of ASDAM 2008",
note = "IEEE conference on Advanced semiconductor devices and microsystems (ASDAM 2008), smolenice,slovakia ; Conference date: 12-10-2008 Through 16-10-2008",
}