DRIE assisted HAR MEMS processing of inertial sensors and actuators

V Rajaraman; SL Paalvast; G Craciun; JC Wolff; KAA Makinwa; PJ French

DRIE assisted HAR MEMS processing of inertial sensors and actuators

V Rajaraman, SL Paalvast, G Craciun, JC Wolff, KAA Makinwa, PJ French

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Book of Abstracts - 18th Workshop on MicroMechanics Europe, MME 2007
Editors	s.l.
Place of Publication	s.l.
Publisher	MME
Pages	333-336
Number of pages	4
ISBN (Print)	978-972-98603-3-1
Publication status	Published - 2007
Event	18th Workshop on MicroMechanics Europe, MME 2007, Guimaraes, Portugal - s.l. Duration: 16 Sept 2007 → 18 Sept 2007

Publication series

Name
Publisher	MME

Conference

Conference	18th Workshop on MicroMechanics Europe, MME 2007, Guimaraes, Portugal
Period	16/09/07 → 18/09/07

Keywords

Elektrotechniek
Techniek
professional journal papers
Conf.proc. > 3 pag

Cite this

@inproceedings{4ead64bc702a4ce0836533053cbb9922,

title = "DRIE assisted HAR MEMS processing of inertial sensors and actuators",

keywords = "Elektrotechniek, Techniek, professional journal papers, Conf.proc. > 3 pag",

author = "V Rajaraman and SL Paalvast and G Craciun and JC Wolff and KAA Makinwa and PJ French",

year = "2007",

language = "Undefined/Unknown",

isbn = "978-972-98603-3-1",

publisher = "MME",

pages = "333--336",

editor = "s.l.",

booktitle = "Book of Abstracts - 18th Workshop on MicroMechanics Europe, MME 2007",

note = "18th Workshop on MicroMechanics Europe, MME 2007, Guimaraes, Portugal ; Conference date: 16-09-2007 Through 18-09-2007",

}

TY - GEN

T1 - DRIE assisted HAR MEMS processing of inertial sensors and actuators

AU - Rajaraman, V

AU - Paalvast, SL

AU - Craciun, G

AU - Wolff, JC

AU - Makinwa, KAA

AU - French, PJ

PY - 2007

Y1 - 2007

KW - Elektrotechniek

KW - Techniek

KW - professional journal papers

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 978-972-98603-3-1

SP - 333

EP - 336

BT - Book of Abstracts - 18th Workshop on MicroMechanics Europe, MME 2007

A2 - s.l., null

PB - MME

CY - s.l.

T2 - 18th Workshop on MicroMechanics Europe, MME 2007, Guimaraes, Portugal

Y2 - 16 September 2007 through 18 September 2007

ER -