| Original language | Undefined/Unknown |
|---|---|
| Pages (from-to) | 241-253 |
| Number of pages | 13 |
| Journal | Microelectronic Engineering |
| Volume | 32 |
| Publication status | Published - 1996 |
Dry etching and induced damage
EWJM van der Drift, R Cheung, T Zijlstra
Research output: Contribution to journal › Article › Scientific › peer-review
18
Citations
(Scopus)