Dual-beam excimer-laser induced Si grain size enlargement in an a-Si / structured SiO2 / metal stack

A Burtsev, R Ishihara

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationProRISC99: proceedings. SAFE99: proceedings [CD-ROM]
Editors JP Veen
Place of PublicationUtrecht
PublisherSTW Technology Foundation
Pages665-670
Number of pages6
ISBN (Print)90-73461-18-9
Publication statusPublished - 1999
Event2nd Annual Workshop on Semiconductor Advances for Future Electronics. IEEE 10th Annual Workshop on Circuits, Systems and Signal Processing, Mierlo - Utrecht
Duration: 24 Nov 199925 Nov 1999

Publication series

Name
PublisherSTW technology foundation

Conference

Conference2nd Annual Workshop on Semiconductor Advances for Future Electronics. IEEE 10th Annual Workshop on Circuits, Systems and Signal Processing, Mierlo
Period24/11/9925/11/99

Keywords

  • ZX Int.klas.verslagjaar < 2002

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