Dual-Gate Fet-Based Charge Sensor Enhanced by In-Situ Electrode Decoration in a MEMS Organs-On-Chip Platform

Hande Aydogmus, H. Joost van Ginkel, Anna-Danai Galiti, Michel Hu, Jean-Philippe Frimat, Arn van den Maagdenberg, GuoQi Zhang, Massimo Mastrangeli, Pasqualina M. Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Abstract

Continuous monitoring of tissue microphysiology is a key enabling feature of the organ-on-chip (OoC) approach for drug screening and disease modeling. Sensing charged species in OoC tissue microenvironments is thereby essential. However, the inherently small (i.e., cm) size of OoC devices poses the challenging requirement to integrate miniaturized and highly sensitive in situ charge sensing components to maximize signal extraction from small volumes (nL to µL, range) of media used in these devices. Here we meet this need by presenting a novel dual-gate field-effect transistor-based charge sensor integrated within an optically transparent microelectromechanical (MEM) OoC device. Post-process mask-less decoration of Ti sensing electrodes by spark-ablated Au nanoparticle films significantly increases the effective electrode surface area and thus sensor sensitivity while retaining the CMOS-compatibility of the wafer-level fabrication process. We validate the biocompatibility of the sensor and its selective response to poly-D-lsine and KC1, and provide a perspective on monitoring cultures and differentiation of hiPSC-derived cortical neurons on our OoC device.
Original languageEnglish
Title of host publication2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
PublisherIEEE
Pages180-183
Number of pages4
ISBN (Electronic)978-1-6654-1267-4
ISBN (Print)978-1-6654-4845-1
DOIs
Publication statusPublished - 2021
Event2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) - Virtual at Orlando, United States
Duration: 20 Jun 202124 Jun 2021
Conference number: 21st

Conference

Conference2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
CountryUnited States
CityVirtual at Orlando
Period20/06/2124/06/21

Bibliographical note

Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care

Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Keywords

  • Biosensor
  • charge sensing
  • electrodes
  • microfabrication
  • organ-on-chip
  • spark ablation
  • neurons

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