Dynamic behavior of the tuning fork AFM probe

D Bayat, T Akiyama, NF de Rooij, U Staufer

Research output: Contribution to journalArticleScientific

16 Citations (Scopus)
Original languageEnglish
Pages (from-to)1018-1021
Number of pages4
JournalMicroelectronic Engineering
Volume85
Publication statusPublished - 2008

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