Dynamic behavior of the tuning fork AFM probe

D Bayat, T Akiyama, NF de Rooij, U Staufer

Research output: Contribution to journal › Article › Scientific

Original language	English
Pages (from-to)	1018-1021
Number of pages	4
Journal	Microelectronic Engineering
Volume	85
Publication status	Published - 2008

NEO

Keywords

@article{421560c344c04ab9b2c18263c3f03f1f,

title = "Dynamic behavior of the tuning fork AFM probe",

keywords = "academic journal papers, Geen BTA classificatie",

author = "D Bayat and T Akiyama and \{de Rooij\}, NF and U Staufer",

note = "NEO",

year = "2008",

language = "English",

volume = "85",

pages = "1018--1021",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

}

TY - JOUR

T1 - Dynamic behavior of the tuning fork AFM probe

AU - Bayat, D

AU - Akiyama, T

AU - de Rooij, NF

AU - Staufer, U

N1 - NEO

PY - 2008

Y1 - 2008

KW - academic journal papers

KW - Geen BTA classificatie

UR - https://www.scopus.com/pages/publications/44149093834

M3 - Article

SN - 0167-9317

VL - 85

SP - 1018

EP - 1021

JO - Microelectronic Engineering

JF - Microelectronic Engineering

ER -