Dynamic characterization of silicon nitride cantilevers

K Babaei Gavan

    Research output: ThesisDissertation (TU Delft)

    Original languageUndefined/Unknown
    QualificationDoctor of Philosophy
    Awarding Institution
    • Delft University of Technology
    Supervisors/Advisors
    • van der Zant, H.S.J., Supervisor
    • van der Drift, E.W.J.M., Advisor
    Award date16 Dec 2009
    Place of PublicationDelft-Leiden
    Publisher
    Print ISBNs978-90-8593-061-7
    Publication statusPublished - 2009

    Keywords

    • academic journal papers
    • Diss. prom. aan TU Delft

    Cite this