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Data supporting the paper: Mechanical dissipation by substrate-mode coupling in SiN resonators
de Jong, M. (Creator), ten Wolde, M. A. (Creator), Cupertino, A. (Creator), Groeblacher, S. (Creator), Steeneken, P. G. (Creator) & Norte, R. A. (Creator), TU Delft - 4TU.ResearchData, 19 Jul 2022
DOI: 10.4121/19209333
Dataset/Software: Dataset