Dynamics and Nonlinearities of the Electro-mechanical coupling in Inertial MEMS

LA Rocha

Research output: Thesis › Dissertation (TU Delft)

Original language	Undefined/Unknown
Qualification	Doctor of Philosophy
Awarding Institution	Delft University of Technology
Supervisors/Advisors	Wolffenbuttel, R.F., Supervisor
Award date	24 Jan 2005
Place of Publication	Delft, The Netherlands.
Publisher	Delft University of Technology
Print ISBNs	90-8559-025-6
Publication status	Published - 2005

Keywords

@phdthesis{a84415f003844514bbcf0fd5667901b9,

title = "Dynamics and Nonlinearities of the Electro-mechanical coupling in Inertial MEMS",

keywords = "official reports, Diss. prom. aan TU Delft",

author = "LA Rocha",

year = "2005",

language = "Undefined/Unknown",

isbn = "90-8559-025-6",

publisher = "Delft University of Technology",

address = "Netherlands",

type = "Dissertation (TU Delft)",

school = "Delft University of Technology",

}