Abstract
Micro and nanomechanical sensors are indispensable in modern consumer electronics, automotive and medical industries. Gas pressure sensors are currently the most widespread membrane-based micromechanical sensors. By reducing their size, their unit costs and energy consumption drops, making them more attractive for integration in new applications. Reducing the size requires the membrane to be as thin as possible, but also very strong. Graphene is the perfect material for such a membrane since it is only one atom thick but also the strongest material ever measured. This dissertation investigates the dynamics of suspended graphene membranes for sensing applications. These sensing applications are not restricted to pressure sensors alone, but the dynamics of graphene can also be used as a sensor for other physical properties. Thus, the topic of this thesis goes into the broader subject of the dynamics of interacting graphene membranes.
Original language | English |
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Awarding Institution |
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Supervisors/Advisors |
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Award date | 20 Nov 2018 |
Print ISBNs | 978-90-8593-369-4 |
DOIs | |
Publication status | Published - 2018 |
Bibliographical note
Casimir PhD Series, Delft-Leiden 2018-39Keywords
- graphene
- two-dimensional materials
- molybdenum disulfide
- nanomechanics
- pressure sensors
- gas sensors
- NEMS
- nonlinear dynamics
- Fabry-Perot interferometer
- thermal characterization
- parametric resonance
- stochastic switching
- squeeze-film effect
- selective permeation
- osmosis