Abstract
A planarized on-chip nanophotonic sensor based on a photonic crystal cavity is realized in this work. The sensor was embedded in a solid protecting material (flowable oxide) with perfect filled holes: this eliminates problems of fouling in practical applications. The functional area of the sensor is created by carefully removing the protecting material only on the top surface of the cavity. A wavelength shift of 7.5 nm was observed in experiment which is very close to a simulation result of 9.0 nm for sensing water (n=1.33) and crude oil (n=1.45) samples. Swift and accurate sensing was verified by a real-time dynamic measurement with rapidly alternating analytes in a microfluid channel.
Original language | English |
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Article number | 095306 |
Number of pages | 7 |
Journal | AIP Advances |
Volume | 7 |
Issue number | 9 |
DOIs | |
Publication status | Published - 2017 |
Keywords
- Photonic crystal waveguides
- Chemical compounds
- Crude oil
- Optical properties
- Electrical properties