Solid-state backscattered-electron detector for sub-keV imaging in scanning electron microscopy

A Sakic; LK Nanver; G van Veen; K Kooijman; P. Vogelsang; TLM Scholtes; W de Boer; WHA Wien; S Milosavljevic; C.Th.H. Heerkens; T Knezevic; I Spee

Solid-state backscattered-electron detector for sub-keV imaging in scanning electron microscopy

A Sakic, LK Nanver, G van Veen, K Kooijman, P. Vogelsang, TLM Scholtes, W de Boer, WHA Wien, S Milosavljevic, C.Th.H. Heerkens, T Knezevic, I Spee

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	English
Title of host publication	ICT.OPEN: Micro technology and micro devices (SAFE 2011)
Editors	A Smeulders, R van den Drift, F Karelse, D Stroobandt
Place of Publication	Veldhoven, The Netherlands
Publisher	STW
Pages	92-95
Number of pages	4
ISBN (Print)	978-90-734641-99-4
Publication status	Published - 2011
Event	ICT.OPEN 2011 - Veldhoven, The Netherlands Duration: 14 Nov 2011 → 15 Nov 2011

Publication series

Name
Publisher	STW

Conference

Conference	ICT.OPEN 2011
Period	14/11/11 → 15/11/11

Keywords

Conf.proc. > 3 pag

Cite this

Sakic, A., Nanver, LK., van Veen, G., Kooijman, K., Vogelsang, P., Scholtes, TLM., de Boer, W., Wien, WHA., Milosavljevic, S., Heerkens, C. T. H., Knezevic, T., & Spee, I. (2011). Solid-state backscattered-electron detector for sub-keV imaging in scanning electron microscopy. In A. Smeulders, R. van den Drift, F. Karelse, & D. Stroobandt (Eds.), ICT.OPEN: Micro technology and micro devices (SAFE 2011) (pp. 92-95). STW.

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title = "Solid-state backscattered-electron detector for sub-keV imaging in scanning electron microscopy",

keywords = "Conf.proc. > 3 pag",

author = "A Sakic and LK Nanver and {van Veen}, G and K Kooijman and P. Vogelsang and TLM Scholtes and {de Boer}, W and WHA Wien and S Milosavljevic and C.Th.H. Heerkens and T Knezevic and I Spee",

year = "2011",

language = "English",

isbn = "978-90-734641-99-4",

publisher = "STW",

pages = "92--95",

editor = "A Smeulders and {van den Drift}, R and F Karelse and D Stroobandt",

booktitle = "ICT.OPEN: Micro technology and micro devices (SAFE 2011)",

note = "ICT.OPEN 2011 ; Conference date: 14-11-2011 Through 15-11-2011",

}

Sakic, A, Nanver, LK, van Veen, G, Kooijman, K, Vogelsang, P, Scholtes, TLM, de Boer, W, Wien, WHA , Milosavljevic, S, Heerkens, CTH, Knezevic, T & Spee, I 2011, Solid-state backscattered-electron detector for sub-keV imaging in scanning electron microscopy. in A Smeulders, R van den Drift, F Karelse & D Stroobandt (eds), ICT.OPEN: Micro technology and micro devices (SAFE 2011). STW, Veldhoven, The Netherlands, pp. 92-95, ICT.OPEN 2011, 14/11/11.

Solid-state backscattered-electron detector for sub-keV imaging in scanning electron microscopy. / Sakic, A; Nanver, LK; van Veen, G et al.
ICT.OPEN: Micro technology and micro devices (SAFE 2011). ed. / A Smeulders; R van den Drift; F Karelse; D Stroobandt. Veldhoven, The Netherlands: STW, 2011. p. 92-95.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Solid-state backscattered-electron detector for sub-keV imaging in scanning electron microscopy

AU - Sakic, A

AU - Nanver, LK

AU - van Veen, G

AU - Kooijman, K

AU - Vogelsang, P.

AU - Scholtes, TLM

AU - de Boer, W

AU - Wien, WHA

AU - Milosavljevic, S

AU - Heerkens, C.Th.H.

AU - Knezevic, T

AU - Spee, I

PY - 2011

Y1 - 2011

KW - Conf.proc. > 3 pag

UR - http://resolver.tudelft.nl/uuid:70dd658f-eab3-46fb-8485-29b1db43c785

M3 - Conference contribution

SN - 978-90-734641-99-4

SP - 92

EP - 95

BT - ICT.OPEN: Micro technology and micro devices (SAFE 2011)

A2 - Smeulders, A

A2 - van den Drift, R

A2 - Karelse, F

A2 - Stroobandt, D

PB - STW

CY - Veldhoven, The Netherlands

T2 - ICT.OPEN 2011

Y2 - 14 November 2011 through 15 November 2011

ER -

Solid-state backscattered-electron detector for sub-keV imaging in scanning electron microscopy

Publication series

Conference

Keywords

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