Early stages fabrication and optical characterisation of new micromachined silicon strain-sensing structures inspired from the campaniform sensillum of insects

DHB Wickasono, G Pandraud, JFV Vincent, PJ French

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationSAFE 2004; Proceedings of semiconductor advances for future electronics
Place of PublicationUtrecht
PublisherTechnology Foundation STW
Pages787-792
Number of pages6
ISBN (Print)90-73461-43-X
Publication statusPublished - 2004
EventSemiconductor advances for future electronics, Veldhoven, The Netherlands - Utrecht
Duration: 25 Nov 200426 Nov 2004

Publication series

Name
PublisherTechnology Foundation STW

Conference

ConferenceSemiconductor advances for future electronics, Veldhoven, The Netherlands
Period25/11/0426/11/04

Keywords

  • Vakpubl., Overig wet. > 3 pag

Cite this