Early stages fabrication and optical characterisation of new micromachined silicon strain-sensing structures inspired from the campaniform sensillum of insects

DHB Wickasono; G Pandraud; JFV Vincent; PJ French

Early stages fabrication and optical characterisation of new micromachined silicon strain-sensing structures inspired from the campaniform sensillum of insects

DHB Wickasono, G Pandraud, JFV Vincent, PJ French

Electronic Instrumentation

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	SAFE 2004; Proceedings of semiconductor advances for future electronics
Place of Publication	Utrecht
Publisher	Technology Foundation STW
Pages	787-792
Number of pages	6
ISBN (Print)	90-73461-43-X
Publication status	Published - 2004
Event	Semiconductor advances for future electronics, Veldhoven, The Netherlands - Utrecht Duration: 25 Nov 2004 → 26 Nov 2004

Publication series

Name
Publisher	Technology Foundation STW

Conference

Conference	Semiconductor advances for future electronics, Veldhoven, The Netherlands
Period	25/11/04 → 26/11/04

Bibliographical note

ed. is niet bekend

Keywords

Vakpubl., Overig wet. > 3 pag

Cite this

@inproceedings{934ccfc67a5947ad8b5d36c1e6956d0e,

title = "Early stages fabrication and optical characterisation of new micromachined silicon strain-sensing structures inspired from the campaniform sensillum of insects",

keywords = "Vakpubl., Overig wet. > 3 pag",

author = "DHB Wickasono and G Pandraud and JFV Vincent and PJ French",

note = "ed. is niet bekend; Semiconductor advances for future electronics, Veldhoven, The Netherlands ; Conference date: 25-11-2004 Through 26-11-2004",

year = "2004",

language = "Undefined/Unknown",

isbn = "90-73461-43-X",

publisher = "Technology Foundation STW",

pages = "787--792",

booktitle = "SAFE 2004; Proceedings of semiconductor advances for future electronics",

}

Wickasono, DHB, Pandraud, G, Vincent, JFV & French, PJ 2004, Early stages fabrication and optical characterisation of new micromachined silicon strain-sensing structures inspired from the campaniform sensillum of insects. in SAFE 2004; Proceedings of semiconductor advances for future electronics. Technology Foundation STW, Utrecht, pp. 787-792, Semiconductor advances for future electronics, Veldhoven, The Netherlands, 25/11/04.

Early stages fabrication and optical characterisation of new micromachined silicon strain-sensing structures inspired from the campaniform sensillum of insects. / Wickasono, DHB; Pandraud, G; Vincent, JFV et al.
SAFE 2004; Proceedings of semiconductor advances for future electronics. Utrecht: Technology Foundation STW, 2004. p. 787-792.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Early stages fabrication and optical characterisation of new micromachined silicon strain-sensing structures inspired from the campaniform sensillum of insects

AU - Wickasono, DHB

AU - Pandraud, G

AU - Vincent, JFV

AU - French, PJ

N1 - ed. is niet bekend

PY - 2004

Y1 - 2004

KW - Vakpubl., Overig wet. > 3 pag

M3 - Conference contribution

SN - 90-73461-43-X

SP - 787

EP - 792

BT - SAFE 2004; Proceedings of semiconductor advances for future electronics

PB - Technology Foundation STW

CY - Utrecht

T2 - Semiconductor advances for future electronics, Veldhoven, The Netherlands

Y2 - 25 November 2004 through 26 November 2004

ER -