Original language | Undefined/Unknown |
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Title of host publication | Proceedings of SPIE 3876 |
Editors | PJ French, E Peeters |
Place of Publication | Bellingham |
Publisher | International Society for Optical Engineering |
Pages | - |
ISBN (Print) | 0-8194-3473-6 |
Publication status | Published - 1999 |
Event | Micromachined Devices and Components V, Santa Clara - Bellingham Duration: 15 Jun 1999 → 17 Jun 1999 |
Publication series
Name | |
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Publisher | International Society for Optical Engineering |
Conference
Conference | Micromachined Devices and Components V, Santa Clara |
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Period | 15/06/99 → 17/06/99 |
Keywords
- ZX Int.klas.verslagjaar < 2002