| Original language | Undefined/Unknown |
|---|---|
| Title of host publication | Proceedings of SPIE 3876 |
| Editors | PJ French, E Peeters |
| Place of Publication | Bellingham |
| Publisher | International Society for Optical Engineering |
| Pages | - |
| ISBN (Print) | 0-8194-3473-6 |
| Publication status | Published - 1999 |
| Event | Micromachined Devices and Components V, Santa Clara - Bellingham Duration: 15 Jun 1999 → 17 Jun 1999 |
Publication series
| Name | |
|---|---|
| Publisher | International Society for Optical Engineering |
Conference
| Conference | Micromachined Devices and Components V, Santa Clara |
|---|---|
| Period | 15/06/99 → 17/06/99 |
Keywords
- ZX Int.klas.verslagjaar < 2002
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