Original language | Undefined/Unknown |
---|---|
Pages (from-to) | 690-700 |
Number of pages | 11 |
Journal | Applied Optics |
Volume | 35 |
Publication status | Published - 1996 |
Effect of lens distortion in optical step-and-scan lithography
JJM Braat, PB Rennspies
Research output: Contribution to journal › Article › Scientific › peer-review
7
Citations
(Scopus)