Effect of lens distortion in optical step-and-scan lithography

JJM Braat, PB Rennspies

Research output: Contribution to journalArticleScientificpeer-review

6 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)690-700
Number of pages11
JournalApplied Optics
Volume35
Publication statusPublished - 1996

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