Effect of pressure on nonlinear dynamics and instability of electrically actuated circular micro-plates

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Abstract

Characterization of nonlinear behavior of micro-mechanical components in MEMS applications plays an important role in their design process. In this paper, nonlinear dynamics, stability and pull-in mechanisms of an electrically actuated circular micro-plate subjected to a differential pressure are studied. For this purpose, a reduced-order model based on an energy approach is formulated. It has been shown that nonlinear dynamics of an electrically actuated micro-plate, in the presence of differential pressure, significantly differs from those under purely electrostatic loads. The micro-plate may lose stability upon either saddle-node or period-doubling bifurcations. It has also been found that in the presence of a differential pressure, increasing the DC or AC voltages may surprisingly help to stabilize the motion of the micro-plate.

Original languageEnglish
Pages (from-to)2157-2170
JournalNonlinear Dynamics: an international journal of nonlinear dynamics and chaos in engineering systems
Volume91 (March 2018)
Issue number4
DOIs
Publication statusPublished - 2017

Keywords

  • Dynamic pull-in
  • Electrostatic
  • Instability
  • MEMS
  • Micro-plate
  • Period-doubling

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