Effect of pressure on the Q factor and resonance frequency of SiN microcantilevers

K Babaei Gavan; J van der Heijden; EWJM van der Drift; HSJ van der Zant

Effect of pressure on the Q factor and resonance frequency of SiN microcantilevers

K Babaei Gavan, J van der Heijden, EWJM van der Drift, HSJ van der Zant

QN/Kavli Nanolab Delft

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Proceedings of the 2009 4th IEEE International
Editors	Hao, Y. Brugger, J. Rooij, N.F.
Place of Publication	Shenzhen, China
Publisher	IEEE
Pages	380-384
Number of pages	5
ISBN (Print)	978-1-4244-4629-2
Publication status	Published - 2009
Event	Conference on Nano/Micro Engineered and Molecular Systems - Shenzhen, China Duration: 5 Jan 2009 → 8 Jan 2009

Publication series

Name
Publisher	IEEE Explore

Name
Volume	2009

Conference

Conference	Conference on Nano/Micro Engineered and Molecular Systems
Period	5/01/09 → 8/01/09

Keywords

conference contrib. refereed
Conf.proc. > 3 pag

Cite this

@inproceedings{21aa3d8173ec402aa81dde98018ddfab,

title = "Effect of pressure on the Q factor and resonance frequency of SiN microcantilevers",

keywords = "conference contrib. refereed, Conf.proc. > 3 pag",

author = "{Babaei Gavan}, K and {van der Heijden}, J and {van der Drift}, EWJM and {van der Zant}, HSJ",

year = "2009",

language = "Undefined/Unknown",

isbn = "978-1-4244-4629-2",

publisher = "IEEE ",

pages = "380--384",

editor = "{Brugger, J. Rooij, N.F.}, {Hao, Y.}",

booktitle = "Proceedings of the 2009 4th IEEE International",

address = "United States",

note = "null ; Conference date: 05-01-2009 Through 08-01-2009",

}

Effect of pressure on the Q factor and resonance frequency of SiN microcantilevers. / Babaei Gavan, K; van der Heijden, J; van der Drift, EWJM ; van der Zant, HSJ.

Proceedings of the 2009 4th IEEE International. ed. / Hao, Y. Brugger, J. Rooij, N.F. Shenzhen, China : IEEE , 2009. p. 380-384.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Effect of pressure on the Q factor and resonance frequency of SiN microcantilevers

AU - Babaei Gavan, K

AU - van der Heijden, J

AU - van der Drift, EWJM

AU - van der Zant, HSJ

PY - 2009

Y1 - 2009

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 978-1-4244-4629-2

SP - 380

EP - 384

BT - Proceedings of the 2009 4th IEEE International

A2 - Brugger, J. Rooij, N.F., Hao, Y.

PB - IEEE

CY - Shenzhen, China

Y2 - 5 January 2009 through 8 January 2009

ER -