Effect of surface roughness and substrate geometry on the coating of nanoparticles using atomic layer deposition

V Dhanasekaran, A Fabre, MT Kreutzer, JR van Ommen

Research output: Contribution to conferenceAbstractScientific

Original languageEnglish
Pages1-1
Number of pages1
Publication statusPublished - 2013
EventMicroNano Conference '13, Ede, The Netherlands - s.l.
Duration: 11 Dec 201312 Dec 2013

Conference

ConferenceMicroNano Conference '13, Ede, The Netherlands
Period11/12/1312/12/13

Cite this

Dhanasekaran, V., Fabre, A., Kreutzer, MT., & van Ommen, JR. (2013). Effect of surface roughness and substrate geometry on the coating of nanoparticles using atomic layer deposition. 1-1. Abstract from MicroNano Conference '13, Ede, The Netherlands, .