Effect of surface roughness and substrate geometry on the coating of nanoparticles using atomic layer deposition

V Dhanasekaran, A Fabre, MT Kreutzer, JR van Ommen

Research output: Contribution to conferenceAbstractScientific

Original languageEnglish
Number of pages1
Publication statusPublished - 2013
EventMicroNano Conference '13, Ede, The Netherlands - s.l.
Duration: 11 Dec 201312 Dec 2013


ConferenceMicroNano Conference '13, Ede, The Netherlands

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