Effect of surfactant on etching characteristics of silicon microstructures etched in THAHW solutions

D Brida

Research output: Book/Report › Report › Professional

Original languageUndefined/Unknown
Place of PublicationDelft
PublisherDelft University of Technology
Number of pages15
Publication statusPublished - 1999

Publication series

Name
PublisherDelft University of Technology

Keywords

  • ZX Int.klas.verslagjaar < 2002

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