Effect of surfactant on surface quality of silicon microstructures etched in saturated TMAHW solutions

PM Sarro, D Brida, W van der Vlist, S Brida

Research output: Contribution to journalArticleScientificpeer-review

68 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)340-345
Number of pages6
JournalSensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
Volume85
Publication statusPublished - 2000

Keywords

  • ZX Int.klas.verslagjaar < 2002

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