@article{c78b396c38d3455b9ae4d74c7f27e25b,
title = "Effect of surfactant on surface quality of silicon microstructures etched in saturated TMAHW solutions",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "PM Sarro and D Brida and {van der Vlist}, W and S Brida",
year = "2000",
language = "Undefined/Unknown",
volume = "85",
pages = "340--345",
journal = "Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers",
issn = "0924-4247",
publisher = "Elsevier",
}