| Original language | Undefined/Unknown |
|---|---|
| Pages (from-to) | 2073-2079 |
| Number of pages | 7 |
| Journal | Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures |
| Volume | 26 |
| Issue number | 6 |
| Publication status | Published - 2008 |
Keywords
- CWTS 0.75 <= JFIS < 2.00