Effect of the interruption of the Propagation Path on the Response of Surface Acoustic Wave Transducers

ThuHang Bui, An Tran, Bruno Morana, Jia Wei, Trinh Chu Duc, Pasqualina M. Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review


This paper presents the effect of an arbitrary interruption of the propagation path in Surface Acoustic Wave (SAW) microdevices on the intensity of the scattered surface waves. Using finite element modeling, simulations have been carried out to validate a new equivalent circuit based on the conventional Mason and Smith model. In addition, experimental results obtained with 30, 50 and 100 μm diameter microholes are reported. The comparison of theory, simulation and experiment proves that it is possible to fabricate an interruption like deep microcavities or microholes in the propagation path which results in an acceptable signal magnitude attenuation, but without shift in the operating frequency.

Original languageEnglish
Title of host publication2016 IEEE Sensors Proceedings
EditorsE. Fontana, C. Ruiz-Zamarreno
Place of PublicationPiscataway, NJ
Number of pages3
ISBN (Electronic)978-1-4799-8287-5
Publication statusPublished - 2016
EventIEEE Sensors 2016: 15th IEEE Sensors Conference - Caribe Royale All-Suite Hotel and Convention Center, Orlando, FL, United States
Duration: 30 Oct 20162 Nov 2016
Conference number: 15


ConferenceIEEE Sensors 2016
Country/TerritoryUnited States
CityOrlando, FL


  • Transducer response
  • SAW biosensors
  • piezoelectric sensors


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