Effect of the pulse offset on the thermal cycle for double excimer laser annealing of implanted silicon

V Gonda, LK Nanver

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageEnglish
Title of host publicationProceedings of OGET conference
Editors s.n.
Place of PublicationGyergyószentmiklós, Romania
PublisherHungarian Technical Scientific Society of Transylvania, Romania
Pages135-138
Number of pages4
Publication statusPublished - 2009
EventOGET Conference, Gyergyószentmiklós, Romania - Gyergyószentmiklós, Romania
Duration: 23 Apr 200926 Apr 2009

Publication series

Name
PublisherHungarian Technical Scientific Society of Transylvania, Romania

Conference

ConferenceOGET Conference, Gyergyószentmiklós, Romania
Period23/04/0926/04/09

Keywords

  • Vakpubl., Overig wet. > 3 pag

Cite this