Effect of undercut on the resonant behaviour of silicon nitride cantilevers

K Babaei Gavan, EWJM van der Drift, WJ Venstra, MR Zuiddam, HSJ van der Zant

Research output: Contribution to journalArticleScientificpeer-review

38 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)035003-1-035003-8
JournalJournal of Micromechanics and Microengineering
Volume19
Issue number3
Publication statusPublished - 2009

Keywords

  • academic journal papers
  • CWTS 0.75 <= JFIS < 2.00

Cite this