@inproceedings{3d2ad6b81689484dbb842acceb291d33,
title = "Effect on annealing on mechanical and optical properties of in-situ doped SiC thin films",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "HMT Pham and {de Boer}, CR and CCG Visser and PM Sarro",
year = "2001",
language = "Undefined/Unknown",
isbn = "0277-786X",
publisher = "International Society for Optical Engineering",
pages = "59--66",
editor = "{NC Tien} and {Quing-An Huang}",
booktitle = "Proceedings of SPIE. Vol. 4601",
note = "Micromachining and Microfabrication Pocess Technology and Devices, Nanjing, China ; Conference date: 07-11-2001 Through 09-11-2001",
}