Effect on annealing on mechanical and optical properties of in-situ doped SiC thin films

HMT Pham, CR de Boer, CCG Visser, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

3 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationProceedings of SPIE. Vol. 4601
Editors NC Tien, Quing-An Huang
Place of PublicationBellingham
PublisherInternational Society for Optical Engineering
Pages59-66
Number of pages8
ISBN (Print)0277-786X
Publication statusPublished - 2001
EventMicromachining and Microfabrication Pocess Technology and Devices, Nanjing, China - Bellingham
Duration: 7 Nov 20019 Nov 2001

Publication series

Name
PublisherInternational Society for Optical Engineering

Conference

ConferenceMicromachining and Microfabrication Pocess Technology and Devices, Nanjing, China
Period7/11/019/11/01

Keywords

  • ZX Int.klas.verslagjaar < 2002

Cite this